The Trilogy IForce linear servo motors are available in a vacuum compatible option (-V), orderable via the extranet E-Configurator. The -V option allows guaranteed operation in high vacuum environments up to 10^-6 Torr, but we have customers successfully using the -V option motors in environments as high as 10^-7 Torr. The -V option on motor coils adds air bleed holes to all blind mounting holes and includes a clean room processing. In clean room processing components are devoid of human contact, machining oils and epoxy patching. The -V option is also available on the IForce magnet tracks, which also adds air bleed holes to all blind mounting holes and clean room processing.
For those that need an extra degree of protection in even higher vacuums, Parker offers a couple of custom options available as outlined below. These custom components must be ordered through our custom quote process on the Parker Extranet.
VAC 2 processing - This customization eliminates the painting and patching step in the manufacturing process of the linear motor coils. Normally, voids in the epoxy encapsulation process are patched with filler, sanded smooth and then painted black. These materials are susceptible to out-gassing at higher vacuum levels and can trap air behind them, thus the materials are eliminated in this step. The result of VAC 2 processing is a swiss cheese effect in some areas of the coil encapsulation in which copper wires can appear to be exposed. The copper windings, however, are fully insulated and pose no danger of arching or high pot problems.PTFE Insulated Flying Leads - This customization replaces the standard Trilogy THF flex cables, and replaces with PTFE (Polytetrafluoroethylene or Teflon) insulated flying leads. The PTFE insulation is much less susceptible to out-gassing than the PVC jacketing on the THF flex cables, and thus is more suitable to high vacuum environments.